True optical resolution beyond the Rayleigh limit achieved by standing wave illumination

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

True optical resolution beyond the Rayleigh limit achieved by standing wave illumination.

During the last decade, various efforts have been undertaken to enhance the resolution of optical microscopes, mostly because of their importance in biological sciences. Herein, we describe a method to increase the resolution of fluorescence microscopy by illuminating the specimen with a mesh-like interference pattern of a laser source and electronic postprocessing of the images. We achieve 100...

متن کامل

Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift

Semiconductor design rules and process windows continue to shrink, so we face many challenges in developing new processes such as 300mm wafer, copper line and low-k dielectrics. The challenges have become more difficult because we must solve problems on patterned and un-patterned wafers. The problems include physical defects, electrical defects, and even macro defects, which can ruin an entire ...

متن کامل

Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by using Standing Wave Illumination Shift

The demand which detects the defect of a detailed structure is increasing. However the resolution of the general optical inspection method is not enough. In order to raise resolution, utilizing the advantage of optical detection, we proposed the novel optical inspection method. Although the steady value was conventionally set up as an initial value of processing, a design value is set as an ini...

متن کامل

Fundamental Verification for 2-dimensional Super- Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination Shift

 Semiconductor design rules and process windows continue to shrink, and developing new processes to accommodate parameters such as less-than-50nm design rules and a 300mm wafer becomes increasingly challenging [1]. Next-generation defect inspection is urgently demanded. Optics and electron beams have been the main technologies for detection of the critical defects, but both have their disadvan...

متن کامل

Theoretical and experimental demonstration of resolution beyond the Rayleigh limit by FINCH fluorescence microscopic imaging.

Fresnel Incoherent Correlation Holography (FINCH) enables holograms to be recorded from incoherent light with just a digital camera and spatial light modulator. We previously described its application to general three dimensional incoherent imaging and specifically to fluorescence microscopy, wherein one complex hologram contains the three dimensional information in the field of view, obviating...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Proceedings of the National Academy of Sciences

سال: 2000

ISSN: 0027-8424,1091-6490

DOI: 10.1073/pnas.130181797